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Phaneuf, Ray

Ray Phaneuf
Professor and Interim Chair
2141 Chemical and Nuclear Engineering Building

News About This Professor


Ph.D., University of Wisconsin—Madison, 1985

Research Interests 

Nanotechnology, surface physics, low energy electron microscopy, photoemission electron microscopy, scanned probe microscopies, templating for directed self-assembly.


Professor Ray Phaneuf joined UMD’s Department of Physics in 1985, where he used electron diffraction to study phase transformations on stepped Si(111) surfaces, resulting in the identification of a thermodynamically driven faceting associated with the formation of the (7x7) reconstruction. In 1989 he visited Ernst Bauer’s group in Clausthal, Germany, using low energy electron microscopy (LEEM) to image this faceting in real time. In 2000 he joined the Department of Materials Science and Engineering, and began studies of directed self-organization during growth and sublimation on semiconductor surfaces, using lithographic patterning. He was a founding member of the UM-MRSEC. In 2006 he was a visiting professor at the National Nanotechnology Laboratory, in Lecce, Italy. He is the founding director of the Interdisciplinary Minor in Nanoscience and Technology at the UMD. He is the author of more than 80 papers in archival journals, and has given over 40 invited talks on his work in the U.S., Europe and Japan. He was named the Laboratory for Physical Sciences Faculty Researcher of the year in 2002. In addition to MSE, he has affiliate positions in Physics and the Department of Electrical and Computer Engineering. His current research is in the fields of directing self-assembly of nanostructures at the mesoscale, plasmonics, and the application of nanotechnology to the conservation of cultural heritage.


Professor Phaneuf currently teaches or has taught rthe following courses:

  • ENES 100: Introduction to Engineering Design
  • ENMA 181: Introduction to Nanomaterials Seminar
  • ENMA 300: Introduction to Materials and Their Applications
  • ENMA 471: Diffusion, Kinetics and Phase Transformations
  • ENMA 490: Materials Design: Capstone Design Course
  • ENMA 698T: Nanotechnology Characterization


Selected Publications 

For a complete list of publications, please visit Professor Phaneuf's web site

“Characteristic Length Scales In Evolution Of Patterned Step Structure On Vicinal Si(111) Surface During High Temperature Annealing”, H-C. Kan, T. Kwon and R. J. PhaneufPhysical Review B 77, 205401-1,-6 (2008)

 “Fluorescence Enhancement from Size-selected Nanoparticles: The Role of an Active Substrate Substrate”, S.-H. Guo, S.-J. Tsai, H.-C.Kan, D.-H. Tsai, Michael R. Zachariah, and R. J. PhaneufAdvanced Materials, 20, 1424-1429 (2008)

“Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation”, J. J. Végh*, D. Nest, D. B. Graves, R. Bruce, S. Engelmann, T. Kwon, R. J. Phaneuf, G. S. Oehrlein, B. K. Long and C. G. Willson, Applied Physics Letters 91, 233113-1,-3 (2007)

 “Plasma-surface interactions of model polymers for advanced photoresists using C4F8 /Ar discharges and energetic ion beams”, S. Engelmann, R. L. Bruce, T. Kwon, R. Phaneuf, G. S. Oehrlein*, Y. C. Bae, C. Andes, D. Graves and D. Nest, E. A. Hudson, P. Lazzeri, E.Iacob, and M. Anderle, Journal of Vacuum Science and Technology 25, 1353-1364 (2007)

“Spatial and Size-Resolved Electrostatic-Directed Deposition of Nanoparticles on a Field-Generating Substrate: Theoretical and Experimental Analysis”, D.-H. Tsai, T. Hawa, H.-C. Kan, R. J. Phaneuf, and M. R. Zachariah, Nanotechnology 18, 365201-36510 (2007)

“Transient Roughening Behavior and Spontaneous Pattern Formation during Plasma Etching of Nanoporous Silica”, T. Kwon, H.-C. Kan, G. S. Oehrlein, and R.J. PhaneufNanotechnology, 18, 055305-055309 (2007)

“Temperature-Driven Change in the Unstable Growth Mode on Patterned GaAs(001)”, T. Tadayyon-Eslami, H.-C. Kan, L. C. Calhoun and R. J. PhaneufPhysical Review Letters 97, 126101-1,-4 (2006)

“Evolution of Patterned GaAs(001) during Homoepitaxial Growth: Size vs. Spacing,”  H.-C. Kan, R. Ankam, S. Shah, K.M. Micholsky, T. Tadayyon-Eslami, L. Calhoun, and R. J. Phaneuf, Phys. Rev. B 73, 195410-1,-8 (2006).

Related News 

MSE Ph.D. Candidate Michael Van Order Discusses Study Abroad Experience
Van Order conducted a semester abroad/internship at TU Dresden last summer, and shares his experience here. December 18, 2017

MSE Students Selected as Finalists for the 2017 Collegiate Inventors Competition
Stretchable Silicon Photovoltaics is a new design for silicon solar cells. September 25, 2017

Ph.D. Candidate Miriam Hiebert Wins Smithsonian Fellowship
Award will allow Hiebert to extend her work at the Museum Conservation Institute. April 24, 2017

Engineering the Preservation of Cultural Heritage
Mimi Hiebert first became fascinated with studying and preserving antiquities thanks to an Egyptian mummy named “Tia.” October 7, 2016

Prof. Ray Phaneuf Appointed Acting Chair of Materials Science and Engineering
Professor Robert M. Briber named Clark School Associate Dean for Research. July 1, 2015

New Software Will Enhance Materials Science and Engineering’s Undergraduate Program
UMD wins one of six computational design toolkits from ASM International. June 9, 2015

Former MSE Postdoc Featured in The Neuron
Timothy Corrigan’s work highlighted by W.V. Division of Science & Research. March 27, 2015

Vote Now! Materials Video Enters Thinkable Competition
»Marquardt showcases conservation work in pursuit of $5K Open Innovation Award. March 9, 2015

Museum Conservation Research Wins Top Prizes in International 3-Minute Thesis Competition
Amy Marquardt uses nanotechnology and materials science to design protective coatings for silver art, artifacts. October 28, 2014

"Diamond Ranking" for MSE Grad Student Research
Marquardt honored by American Ceramics Society. October 24, 2014

Vote Now! Materials Grad Student is Finalist in 3 Minute Thesis Competition (VIDEO)
Amy Marquardt uses nanotechnology to protect silver art and artifacts. October 7, 2014

Phaneuf Delivers Keynote on Conservation Research
Professor presents work on nanocoatings used to protect art and artifacts. September 25, 2014

2014 Dean's Student Research Awards Announced
Graduate students recognized for high quality engineering research July 1, 2014

Marquardt Wins Dean’s Doctoral Research Award for “Protecting Art with Nanotechnology”
Grad student partners with conservators to save works in silver and bronze. May 21, 2014

NSF Graduate Research Fellowships and Honorable Mentions
MSE alumnus and current students recognized by National Science Foundation. April 24, 2014

Using Materials Science and Engineering to Save Priceless Artifacts
Graduate student Amy Marquardt wins CIC-Smithsonian Fellowship. March 7, 2014

Six graduate students participating in UMD-Trento research exchange
The program is part of a broad partnership between Maryland and Trento, Italy. January 20, 2014

MSE Professors to Present Historical Preservation Work at Smithsonian-UMD Celebration
Livingston, Phaneuf will discuss preservation of stone and metal. October 29, 2013

Atoms-Thick Coating Ready for First Test on Silver Artifact
Science covers efforts to protect objects in Walters Art Museum collection. April 19, 2013

Marquardt Wins AVS Travel Grant
Grad student will attend American Vacuum Society Symposium, present work on protecting silver artifacts. September 20, 2012

American Vacuum Society Covers Ongoing Efforts to Protect Silver Artifacts
MSE collaboration with Walters Art Museum uses nanotechnology to prevent tarnish. September 6, 2012

ResearchFest 2012
Marquardt receives top prize; Chiang, Fernandes and Hsu also selected for honors. April 12, 2012

Rubloff Talks Atomic Layer Deposition with C&EN
Article on thin films also highlights work of MSE grad student Konstantinos Gerasopoulos. August 2, 2011

MSE Capstone 2011
Students create lab-on-a-chip device for use in targeted cancer therapy. June 15, 2011

Oehrlein, Phaneuf Paper Among AVS' Most Downloaded
Work covers plasma-polymer interactions in photolithography at the nanoscale. June 6, 2011

Materials Scientists, Conservators Join Forces to Preserve Silver Artifacts and Art
Team developing nanometers-thick, protective coatings using atomic layer deposition. October 25, 2010

Marquardt Studies Patinas at Smithsonian Institution
Microscopy, spectroscopy and microanalysis used to analyze bronze art. August 25, 2010

MSE Capstone 2010
Students design and create prototype dynamic MEMS microphone. May 21, 2010

Phaneuf Invited to Aspen Institute Italia's Transatlantic Dialog
Professor participates in international discussions of science in social, political and economic contexts. December 14, 2009

MSE Capstone 2009
Seniors present work on novel shape-memory polymer stent. May 21, 2009

Phaneuf, Takeuchi Promoted to Full Professorship
New rank effective July 1, 2009. April 30, 2009

Lin Takes 2nd in GRID Modeling and Simulation
Research explores nanostructure evolution on patterned surfaces. April 23, 2009

Phaneuf Group Research Selected for VJBO
Paper covers nanoparticle-enhancement of fluorescence. December 5, 2008

6 Professors Named 2008 Research Leaders
Briber, Phaneuf, Rabin, Rubloff, Takeuchi and Wuttig honored at luncheon. October 22, 2008

Phaneuf Presents at Nanosteps, Selected for Virtual Journal
Work on nanostructures and templating continues to receive attention. August 29, 2008

MSE Capstone 2008
Seniors tackle microfluidic mixing. May 19, 2008

Bruce to Attend NSF Program in Australia
Program fosters collaborations, provides project leadership training. May 9, 2008

Phaneuf Press Release Gets Noticed
Story on "growing" computers featured online, in print, on TV. February 7, 2008

"Nature-Made" Computers
Clark School Engineers Teach Nature to "Grow" High-Tech Components October 30, 2007

MSE Faculty Continues to Produce "Research Leaders"
Professors honored for their efforts to bring sponsored research funds to campus. October 29, 2007

Phaneuf Group Presents at American Physical Society Meeting
Guo, Kan, Tsai, and Tadayyon-Eslami present recent work. April 2, 2007

Phaneuf Set to Teach FDA Scientists
Course will cover microsopy and nanostructure characterization. February 5, 2007

Phaneuf Invited to Lecture in Germany, Italy
Professor shares recent work on GaAs(001) mechanisms. December 7, 2006

5 MSE Professors Recognized for Sponsored Research
Briber, Oehrlein, Phaneuf, Rubloff, and Wuttig honored at luncheon. November 28, 2006

Phaneuf, Tadayyon-Eslami's Paper Accepted in Physical Review Letters
Work by professor and student in forthcoming issue. August 28, 2006

Phaneuf Article on Ag Nanopillars Selected for Online Compilation
Virtual Journal of Nanoscale Science and Technology covers a focused area of frontier research. March 27, 2006

Undergraduate Research Presented on National Stage
MSE undergraduate presents paper to American Physical Society. March 15, 2006

Oehrlein and Phaneuf Receive NSF Grant for Nano Research
Two MSE professors were awarded a NSF-NIRT grant for $1.2M to investigate "Nanotechnological Manufacturing: Nanostructured Polymers Designed for Plasma/Energetic Beam Templating of Materials". February 27, 2006

Prof. Phaneuf directs new minor in Nanoscale Science and Technology
The University will offer a new interdisciplinary minor in Nanoscale Science and Technology beginning in the Spring 2006 semester. More information is available at: February 27, 2006

65th Annual Physical Electronic Conference
Taesoon Kwon and Tabassom Tadayyon-Eslami, both MSE graduate students working in Professor Raymond Phaneuf’s research group, participated in the 65th Annual Physical Electronics Conference, held at the University of Wisconsin campus in Madison, Wisconsin from June 20-22, 2005. February 27, 2006